In-Situation Heating Stage for FIB or SEM(ISHS)
페이지 정보
작성자 최고관리자 작성일17-05-16 14:42 조회2,487회 댓글0건관련링크
본문
Some scientists & engineers want to control temperature when they measure some species for SEM or FIB. They are UHV environment and the stage is high accuracy system. The temperature influence each parts, gun, stage and chamber, especially stage,It is nano-meter scale movements.
“In-situ Heating Stage System”is best solution of high temperature stage for SEM&FIB.
- Heater size : >Ø85(min)
- Temperature range : >600℃ ± 1.5%
- Cooling system : PCW
- Vacuum Range : > 10-7
“In-situ Heating Stage System”is best solution of high temperature stage for SEM&FIB.
- Heater size : >Ø85(min)
- Temperature range : >600℃ ± 1.5%
- Cooling system : PCW
- Vacuum Range : > 10-7
댓글목록
등록된 댓글이 없습니다.